Smoothing the Surface: MST® Turbo-Charges GAA Devices

Published: August 1, 2022

Smoothing the Surface:  MST® Turbo-Charges GAA Devices

Whitepaper by Robert Mears and Hideki Takeuchi

In this White Paper we outline some recent learning on Atomera’s MST® technology and how it improves carrier mobility. We have discovered that MST reduces surface roughness scattering, and hence improves surface-roughness-limited mobility, by 55%. We believe that this result is important for doped and undoped devices operated at high vertical effective field, including leading edge gate-all-around (GAA) devices.