Epitaxial Deposition

MST is a High Quality Single Crystal Film

Uses Reduced Pressure Epitaxial Deposition

  • MST is deposited using industry standard Reduced Pressure Epitaxial deposition tools. Using temperature and pressure regimes compatible with state-of-the-art semiconductor devices, Atomera has successfully deposited MST using tools made by each of the leading Epitaxial deposition equipment suppliers
  • Atomera engineers have developed significant know-how in growing MST films with unique properties
  • These patented proprietary epitaxial processes allow for precise atomistic epitaxial growth and deposition
  • Using in-house developed techniques and spectroscopic ellipsometry (SE) metrology, MST film quality can be monitored in volume production
MST Epitaxial Deposition
Microscopic image of MST material
Microscopic image of MST material

Supported by Major Semiconductor Tool Suppliers

Applied Materials