TechnologyMSTcad™ - TCAD
Simulating MST Benefits with Atomera’s MSTcad
MSTcad™ is a Mathematical Model for Synopsys Sentaurus Device Platform
- MSTcad™ models the intricate physical properties and the evolution of MST during the manufacturing of semiconductor devices.
- Validation of physical characteristics and electrical performance simulated with MSTcad™ has been confirmed by Atomera on silicon, for accurate integration of MST into semiconductor devices.
- MSTcad™ is available for Sentaurus™ Process and Device simulation packages, for physical and electrical characterization.
Example: Boron Dopant Profiles in MSTcad™
- 10x interface Boron reduction at GOX interface
Example: Modeling NMOS 5V Vtlin in MSTcad™
- Vt vs. Well Dose sensitivity shows good match between measured data and MSTcad™