MST Dopant Blocking for Advanced 3D Applications

Published: June 29, 2021

MST® Dopant Blocking for Advanced 3D Applications

Whitepaper by Robert Mears

In my previous blog I highlighted our excitement at our latest result for MST dopant blocking. As promised, we are now posting a follow-up white paper. The paper puts the new MST data in context for advanced 3D architectures for the 2/3nm node, such as nanosheets or gate-all-around (GAA) devices. Happy reading!

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