MST® Dopant Blocking for Advanced 3D Applications
Whitepaper by Robert Mears
In my previous blog I highlighted our excitement at our latest result for MST dopant blocking. As promised, we are now posting a follow-up white paper. The paper puts the new MST data in context for advanced 3D architectures for the 2/3nm node, such as nanosheets or gate-all-around (GAA) devices. Happy reading!