Mears Silicon Technology (MST®) is an ultra-thin film of reengineered semiconductor that incorporates layers of non-semiconductor material. For CMOS applications, we typically deposit partial monolayers of oxygen during epitaxy of a thin single crystal silicon layer, which may be only a few tens of lattice spacing thick. The engineered silicon lattice has unique electrical properties which address several key device engineering challenges the industry currently faces as it seeks to reduce costs and lower power consumption.