Technology
Epitaxial DepositionMST is a High Quality Single Crystal Film
Uses Reduced Pressure Epitaxial Deposition
- MST is deposited using industry standard Reduced Pressure Epitaxial deposition tools. Using temperature and pressure regimes compatible with state-of-the-art semiconductor devices, Atomera has successfully deposited MST using tools made by each of the leading Epitaxial deposition equipment suppliers
- Atomera engineers have developed significant know-how in growing MST films with unique properties
- These patented proprietary epitaxial processes allow for precise atomistic epitaxial growth and deposition
- Using in-house developed techniques and spectroscopic ellipsometry (SE) metrology, MST film quality can be monitored in volume production
Microscopic image of MST material
Supported by Major Semiconductor Tool Suppliers
