Technology

TCAD

MST benefits can be shown with TCAD Tools Available Now

Atomera’s MST module can be modeled using Synopsys’ Sentaurus TCAD with MSTcad™

  • MSTcad add-on code developed by Atomera
  • Sentaurus™ TCAD tools help manufacturers develop and optimize semiconductor process technologies and devices
  • Atomera is offering MSTcad with Synopsys support for select customers under NDA
Atomera TCAD Technology

Example: Capturing Boron Doping Profiles with TCAD

  • 10x interface Boron reduction at GOX interface
  • Simulated Boron profile matches to SIMS profile for both Ctrl and MST

Example: Modeling NMOS 5V Vtlin TCAD

  • Vt vs. Well Dose sensitivity shows good match between measured data and TCAD
Capturing Boron doping profiles with TCAD
Modeling NMOS 5V Vtlin TCAD